Gas room set up at Siltronic H2 Bunker at REC CDA Plant at Soitec (SOITEC)
Client : Air Liquide
Start Date :January 01 2018
End Date :December 30 2022
Category : Finished
Scop of Work : Selection, Design, EPI POU SCRUBBERS
Line of Activities : Life Safety Systems (LSS)- Gas Leak, Process Exhaust, Process Cooling Water(PCW), Make Up Air Unit (MAU),
Loaction :Singapore
TPS has been appointed by Air Liquide to provide detailed Design for Various semi-conductor customers and Gas room set up at Siltronic H2 Bunker at REC CDA Plant at Soitec. Epitaxy Facility Set up at Soitec.
TPS has been appointed by Air Liquide to provide the flowing engineering services for various needs
- Selection, Design, EPI POU SCRUBBERS
- Bulk TCS room design
- Bulk HCL room design
- TCS room exhaust design
- H2 dilution exhaust design
- Space management drawings
- Clean room expansion FOR EPI01 AND EPI02
- Compliance
- HAZOP study on the above expansion
- BSGS Gas Systems Design support
- Bulk Gas Design and Pressure Loss calculation (GN2, PN2, CDA,
- HPCDA, PAr, PO2, PHe, PH2 )
- Tool change out tracking management
- Gas rooms design space management drawings
- CLF3 Gas Room
- Flammable Gas Room
- Corrosive Gas Room
- Insert Gas Room